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Lookup NU author(s): Dr Sanatan Chattopadhyay
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Author(s): Pey KL, Chattopadhyay S, Choi WK, Miron Y, Fitzgerald EA, Antoniadis DA, Ospowicz T
Publication type: Article
Publication status: Published
Journal: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Year: 2004
Volume: 22
Issue: 2
Pages: 852-858
ISSN (print): 1071-1023
ISSN (electronic): 1520-8567
Publisher: American Institute of Physics
URL: http://dx.doi.org/10.1116/1.1688350
DOI: 10.1116/1.1688350
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