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Lookup NU author(s): Professor Nick Cowern
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Author(s): Pawlak BJ, Vandervorst W, Lindsay R, De Wolf I, Roozeboom F, Delhougne R, Benedetti A, Loo R, Caymax M, Maex K, Cowern NEB
Editor(s): Pichler, P., Claverie, A., Lindsay, R., Orlowski, M., Windl, W.
Publication type: Conference Proceedings (inc. Abstract)
Publication status: Published
Conference Name: Silicon Front-End Junction Formation-Physics and Technology
Year of Conference: 2004
Pages: 423-428
ISSN: 0272-9172
Publisher: Materials Research Society
Library holdings: Search Newcastle University Library for this item
Series Title: Materials Research Society Symposium Proceedings
ISBN: 1558997601