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Effect of amorphization and carbon co-doping on activation and diffusion of boron in silicon

Lookup NU author(s): Professor Nick Cowern

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Author(s): Pawlak BJ, Janssens T, Brijs B, Vandervorst W, Collart EJH, Felch S, Cowern NEB

Publication type: Article

Publication status: Published

Journal: Applied Physics Letters

Year: 2006

Volume: 89

Issue: 6

ISSN (print): 0003-6951

ISSN (electronic): 1077-3118

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.2227863

DOI: 10.1063/1.2227863

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