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Lookup NU author(s): Professor Nick Cowern
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Author(s): Cowern NEB; Mannino G; Stolk PA; Roozeboom F; Huizing HGA; van Berkum JGM; Cristiano F; Claverie A; Jaraiz M
Publication type: Article
Publication status: Published
Journal: Materials Science in Semiconductor Processing
Year: 1999
Volume: 2
Pages: 369-376
ISSN (print): 1369-8001
ISSN (electronic): 1873-4081
Publisher: Elsevier Science Ltd
URL: http://dx.doi.org/10.1016/S1369-8001(99)00039-6