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Suppression of boron interstitial clusters in SOI using vacancy engineering

Lookup NU author(s): Professor Nick Cowern

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Author(s): Smith AJ, Colombeau B, Gwilliam R, Cowern NEB, Sealy BJ, Milosavljevic M, Collart E, Gennaro S, Bersani M, Barozzi M

Publication type: Article

Publication status: Published

Journal: Materials Science and Engineering B

Year: 2005

Volume: 124-125

Pages: 210-214

ISSN (print): 1873-4944

Publisher: Elsevier SA

URL: http://dx.doi.org/10.1016/j.mseb.2005.08.128

DOI: 10.1016/j.mseb.2005.08.128

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