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Understanding the role of buried Si/SiO2 interface on dopant and defect evolution in PAI USJ

Lookup NU author(s): Professor Nick Cowern

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Author(s): Hamilton JJ, Collart EJH, Colombeau B, Bersani M, Giubertoni D, Sharp JA, Cowern NEB, Kirkby KJ

Publication type: Article

Publication status: Published

Journal: Materials Science and Engineering B

Year: 2005

Volume: 124-125

Pages: 215-219

ISSN (print): 1873-4944

Publisher: Elsevier SA

URL: http://dx.doi.org/10.1016/j.mseb.2005.08.055

DOI: 10.1016/j.mseb.2005.08.055

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