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Lookup NU author(s): Dr Chen Fu
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Author(s): Oh H, Fu C, Yang SS, Wang W, Lee K
Publication type: Article
Publication status: Published
Journal: Journal of Micromechanics and Microengineering
Year: 2012
Volume: 22
Issue: 4
Online publication date: 15/03/2012
ISSN (print): 0960-1317
ISSN (electronic): 1361-6439
Publisher: Institute of Physics Publishing Ltd
URL: https://doi.org/10.1088/0960-1317/22/4/045007
DOI: 10.1088/0960-1317/22/4/045007
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