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Boron uphill diffusion during ultrashallow junction formation

Lookup NU author(s): Professor Nick Cowern

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Author(s): Cowern NEB; Duffy R; Venezia VC; Heringa A; Husken TWT; Hopstaken MJP; Griffin PB; Wang CC

Publication type: Article

Publication status: Published

Journal: Applied Physics Letters

Year: 2003

Volume: 82

Issue: 21

Pages: 3647-3649

ISSN (print): 0003-6951

ISSN (electronic): 1077-3118

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.1578512

DOI: 10.1063/1.1578512

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