Browse by author
Lookup NU author(s): Dr Harriet Grigg, Dr Barry Gallacher
Full text for this publication is not currently held within this repository. Alternative links are provided below where available.
MEMS resonators offer attractive prospects in several application areas, including high-performance, low cost sensors, among several others. The performance of many resonant MEMS depends critically on the Q factor, and an important, poorly quantified contribution to the overall Q is the support loss. Additionally, the parameter space for the geometry can be of moderately high dimension, making FEA based parametric optimisation computationally inefficient. Thus motivated, a numerical method based on the Rayleigh-Ritz substructure synthesis using quasicomparison functions is developed, applicable to a wide and important class of beam resonators. It is shown to be highly efficient by comparison with classical FEA methods, facilitating a detailed examination of the support Q as a function of position in parameter space. Selected results are presented and briefly discussed, with particular attention given to convergence, computational efficiency and design optimisation. General design principles for multiply-supported framelike beam resonators are considered in the light of the results, and extensions to the modelling are briefly covered.
Author(s): Grigg HTD, Gallacher BJ
Publication type: Article
Publication status: Published
Journal: Journal of Physics: Conference Series
Year: 2012
Volume: 382
Issue: 1
ISSN (print): 1742-6588
ISSN (electronic): 1742-6596
Publisher: IOP Science
URL: http://dx.doi.org/10.1088/1742-6596/382/1/012028
DOI: 10.1088/1742-6596/382/1/012028
Notes: Modern Practice in Stress and Vibration Analysis 2012 (MPSVA 2012). 28-31 August 2012, University of Glasgow, UK.
Altmetrics provided by Altmetric
