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Lookup NU author(s): Dr Pedro Ortiz, Dr Neil Keegan, Julia SpoorsORCiD, Emeritus Professor Calum McNeilORCiD
Full text for this publication is not currently held within this repository. Alternative links are provided below where available.
Author(s): Velten T, Biehl M, Haberer W, Koch T, Ortiz P, Keegan N, Spoors J, Hedley J, McNeil C
Editor(s): Richard C. Kullberg; Rajeshuni Ramesham
Publication type: Conference Proceedings (inc. Abstract)
Publication status: Published
Conference Name: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
Year of Conference: 2009
Pages: Article No. 720603
Publisher: SPIE - The International Society for Optical Engineering
Library holdings: Search Newcastle University Library for this item
Series Title: Proceedings of SPIE - The International Society for Optical Engineering
ISBN: 9780819474520
