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Lookup NU author(s): Luís Alves, Dr Abel Brieva, Professor Lidija Siller
The structure of nitride containing gold films produced by reactive ion sputtering and nitrogen plasma etching is investigated using x-ray photoelectron spectroscopy and x-ray diffraction. It is found that gold nitride is a solid solution of nitrogen atoms dissolved in a fcc gold matrix. Differences between the strain and lattice parameters of gold and gold nitride films were observed and are explained by interstitial nitrogen present in the latter. c 2008 American Institute of Physics. [DOI: 10.1063/1.3040717]
Author(s): Alves L, Hase TPA, Hunt MRC, Brieva AC, Siller L
Publication type: Article
Publication status: Published
Journal: Journal of Applied Physics
Year: 2008
Volume: 104
Issue: 11
Print publication date: 01/12/2008
Date deposited: 25/08/2010
ISSN (print): 0021-8979
ISSN (electronic): 1089-7550
Publisher: American Institute of Physics
URL: http://dx.doi.org/10.1063/1.3040717
DOI: 10.1063/1.3040717
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